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Wafer Failure Analysis for Yield Enhancement - abridged table of contents
Non-encapsulated Cross Section Basics
High Energy Passive Voltage ContrastFAQ
| The information in this tutorial is offered as a reference
to help in failure analysis of semiconductor products. Included are examples of material compiled for a book titled, Wafer Failure Analysis for Yield Enhancement, written by Dave Burgess and Dick Blanchard, with contributions by Joe Gajda. The purpose of this book is to show how a small, affordable subset of failure analysis tools can speed process development and improve yields. Material will be added from time to time. Your comments and suggestions are welcome and will shape the content of this tutorial section. |
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