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| WFA-02 | Wafer Failure Analysis for Yield Enhancement (Accelerated Analysis, 2002) Author's Note (.pdf 77KB / 2 pages) Table of Contents (.pdf 100KB / 4 pages) |
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In this practical evolving text authors David Burgess and Dr. Richard Blanchard focus on problems encountered in today's global semiconductor setting. Explanations of failure and yield mechanisms begin at observable symptoms and follow through to causes and corrective action. The goal of the WFA book (and the seminar) is to demonstrate a proven failure analysis approach to solve problems quickly. The following is an abbreviated table of contents: Introduction / Overview The Process & The Approach Yield Reduction Mechanisms: Design Process Assembly Test Electrical Fault Isolation Physical Fault Localization Sample Preparation Techniques Analytical Techniques Test Structures Equipment Appendices: Charts and Tables Acronyms and Abbreviations Glossary Resources |
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| FAIC-99 | Failure Analysis of Integrated Circuits: Tools and Techniques (Kluwer, 1999) |
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This book, edited by Dr. Lawrence Wagner, consists of 15 chapters written by recognized leaders in semiconductor failure analysis. It is an excellent reference for analysis techniques and methods. This list of chapter titles reveals its scope of coverage: Introduction Electrical Characterization Package Analysis: SAM and X-ray Die Exposure Global Failure Site Isolation: Thermal Techniques Failure Site Isolation: Photon Emission... , Optical/E-Beam Techniques Probing Technology for IC Diagnosis Deprocessing Cross-section Analysis Inspection Techniques Chemical Analysis Energy Dispersive Spectroscopy Auger Electron Spectroscopy Secondary Ion Mass Spectrometry, SIMS Failure Analysis Future Requirements |
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